Integrated capacitors for conductive lithographic film circuits

Lithographic Film Circuits - A Review

P. S. A. Evans, P. M. Harrey, B. J. Ramsey & D. J. Harrison Abstra t Condu tive Lithographi Films are an emerging fabri ation pro ess for ele troni inter onne t and a range of passive omponent stru tures. This paper reviews the manufa ture, properties and appli ations of CLF ondu tors, and dis usses other lithographi ally deposited ele troni materials in luding resistive, diele tri and ferrite ...

Pentacene integrated thin-film transistors and circuits

Thin film wavelength converters for photonic integrated circuits

Quasi-phase-matched (QPM) wavelength converters are highly desirable for emerging nonlinear optics applications in photonic integrated circuits, but available waveguide and quasi-phase-matching technologies have so far constrained their realization. In this work, we present a periodically poled lithium niobate (LN) waveguide on a silicon nitride– thin film LN platform. It contains a submicromet...

A MEMS Capacitive Microphone Modelling for Integrated Circuits

In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...

Comparison of Paraelectric and Ferroelectric Materials for Applications as Dielectrics in Thin Film Integrated Capacitors

Ferroelectrics such as BaTiO3, PbxZr1-xTiO3 and BaxSr1-xTiO3 can exhibit dielectric constants up to three orders of magnitude higher than those of paraelectric materials such as SiO2, Al2O3, Ta2O5, and BCB. However, the dielectric properties of ferroelectrics are typically a stronger function of temperature, frequency, film thickness, and bias resulting in significant nonlinearities in their pe...